DocumentCode :
619134
Title :
Digital closed-loop driver design of micromechanical gyroscopes based on coordinated rotation digital computer algorithm
Author :
Yuxian Liu ; Chunhua He ; Dachuan Liu ; Zhenchuan Yang ; Guizhen Yan
Author_Institution :
Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication Inst. of Microelectron., Peking Univ., Beijing, China
fYear :
2013
fDate :
7-10 April 2013
Firstpage :
1145
Lastpage :
1148
Abstract :
A novel digital closed-loop driver is presented for a micromechanical vibratory gyroscope in this paper. Coordinated rotation digital computer algorithm is applied to generate the sine and cosine signals for driving and demodulation processing. Meanwhile, automatic gain control and phase-locked loop are adopted to maintain a constant velocity of the drive mode and guarantee the gyroscope working in the resonant mode. All the control methods are implemented in FPGA device. Experimental results demonstrate that the stability of the amplitude of the drive velocity is about 18ppm, which verifies the effectiveness and accuracy of the digital closed loop for the drive mode. The scale factor, nonlinearity and bias instability of the gyroscope with closed loop controlled sense mode are measured to be 18.5mV/deg/s, 0.088% and 19.4deg/h, respectively.
Keywords :
angular velocity control; automatic gain control; closed loop systems; demodulation; digital arithmetic; digital control; field programmable gate arrays; gyroscopes; microsensors; phase locked loops; signal generators; signal processing; stability; vibration measurement; CORDIC algorithm; FPGA device; amplitude stability; automatic gain control; closed loop controlled sensor measurement; coordinated rotation digital computer algorithm; cosine signals generation; demodulation processing; digital closed-loop driver design; drive mode constant velocity; instability; micromechanical vibratory gyroscope; phase-locked loop; sine signal generation; Demodulation; Field programmable gate arrays; Force; Gyroscopes; Mathematical model; Micromechanical devices; Phase locked loops; CORDIC algorithm; Closed Loop; LMS; MEMS vibratory gyroscope;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
Type :
conf
DOI :
10.1109/NEMS.2013.6559924
Filename :
6559924
Link To Document :
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