Title :
A Robust Flexible Electrochemical Gas Sensor Using Room Temperature Ionic Liquid
Author :
Xiaoyi Mu ; Zhe Wang ; Xiangqun Zeng ; Mason, Andrew J.
Author_Institution :
Dept. of Electr. & Comput. Eng., Michigan State Univ., East Lansing, MI, USA
Abstract :
This paper introduces a robust electrochemical gas sensor featuring room temperature ionic liquid (RTIL) as electrolyte and porous polytetrafluoroethylene as a flexible substrate. Using a planar-electrodes-on-permeable-membrane structure, a flexible RTIL sensor with 9.6 mm2 sensing area is microfabricated. The sensor´s response to oxygen is measured, achieving sensitivity of 0.48 μA/%O2, a linearity of 0.997 R2 in range of 0%-21% O2, and limit of detection of 0.08% O2. The reported sensor structure and fabrication process enable realization of sensor arrays for multi-gas monitoring in a low power, miniaturized, and wearable system platform.
Keywords :
electrochemical electrodes; electrochemical sensors; gas sensors; membranes; microfabrication; polymer electrolytes; porous materials; sensor arrays; electrolyte; flexible RTIL sensor; flexible substrate; microfabrication; multigas monitoring; planar-electrodes-on-permeable-membrane structure; porous polytetrafluoroethylene; robust flexible electrochemical gas sensor; room temperature ionic liquid; sensor array; temperature 293 K to 298 K; wearable system platform; Gas sensor; electrochemical sensor; flexible sensor; room temperature ionic liquid;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2013.2262932
