Title :
Detection of Micro-Arc Discharge Using ESC Wafer Stage With Built-In AE Sensor
Author :
Kasashima, Y. ; Tabaru, Tatsuo ; Kobayashi, Yoshiyuki ; Yasaka, Mitsuo ; Yamaguchi, Satarou ; Akiyama, Masanori ; Uesugi, F.
Author_Institution :
Meas. Solution Res. Center, Nat. Inst. of Adv. Ind. Sci. & Technol., Saga, Japan
Abstract :
An electrostatic chuck (ESC) wafer stage with a built-in acoustic emission (AE) sensor is developed to detect micro-arc discharge occurring around a wafer. The built-in AE sensor detects acoustic waves caused by anomalous discharge with high sensitivity. The results demonstrate the effectiveness of this novel ESC wafer stage for detecting micro-arc discharge occurring around a wafer and will contribute greatly to improving the production yield of semiconductor manufacturing.
Keywords :
acoustic transducers; acoustic waves; arcs (electric); integrated circuit yield; acoustic waves; anomalous discharge; built-in acoustic emission sensor; electrostatic chuck wafer stage; micro-arc discharge detection; production yield; semiconductor manufacturing; Acoustic emission sensor; Micro-arc discharge; electrostatic chuck; plasma etching;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2013.2263295
