Dynamic inverse contour control for PMLSM direct drive XY table based on velocity field

For the problem that uncoordinated and nonlinearity have a serious impact on the contour accuracy of the system of permanent magnet linear synchronous motor (PMLSM) direct drive XY table, a dynamic inverse control based on velocity field theory was proposed. Biaxial coordination control was transformed to single-axis speed control using velocity field theory. So that contour control can be achieved by simply regulating the velocity error of the single-axis. Single-axis velocity controller was designed using dynamic inverse control method to make the velocity error approach to zero. The method can weaken the nonlinear factors of the system and reduce the velocity error so that the output position converged asymptotically at the given position to complete the contour tracking task. The simulation results show that the designed controller makes the system of XY table have high contour machining precision.