Title :
15 GHz SAW nano-transducers using ultrananocrystalline diamond/AlN thin films
Author :
Dow, A.B.A. ; Ahmed, Arif ; Bittner, Achim ; Popov, C. ; Schmid, Ulrich ; Kherani, Nazir P.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Toronto, Toronto, ON, Canada
Abstract :
This article reports on the realization of high frequency surface acoustic wave (SAW) resonator architectures on a bi-layer aluminium nitride (AlN) /ultrananocrystalline diamond (UNCD) structure using electron beam lithography (EBL) and lift-off processes. The UNCD layer was simply synthesized using microwave plasma enhanced vapour deposition (MWPECVD). An optimized EBL process was utilized to fabricate the inter-digital transducers (IDTs) with a finger resolution of 145 nm. The fabricated device exhibited an operating frequency of 15.4 GHz, insertion loss of ~40 dB and an acoustic velocity of 8816 m/s.
Keywords :
aluminium compounds; diamond; electron beam lithography; interdigital transducers; nanostructured materials; plasma CVD; surface acoustic wave resonators; AlN; EBL; IDT; MWPECVD; aluminium nitride; bi layer AlN UNCD structure; electron beam lithography; frequency 15.4 GHz; high frequency SAW resonator architectures; inter digital transducers; liftoff processes; microwave plasma enhanced vapour deposition; nanotransducers; surface acoustic wave; ultrananocrystalline diamond; velocity 8816 m/s; Diamonds; Films; III-V semiconductor materials; Surface acoustic wave devices; Surface acoustic waves; AlN/UNCD; electron beam lithography; surface acoustic wave;
Conference_Titel :
Ultrasonics Symposium (IUS), 2012 IEEE International
Conference_Location :
Dresden
Print_ISBN :
978-1-4673-4561-3
DOI :
10.1109/ULTSYM.2012.0242
