Performance assessment Of CMUTs in dual modality imaging/HIFU applications

Author

Meynier, Cyril ; Yanamer, Yalcin ; Canney, Michael ; Nguyen-Dinh, An ; Carpentier, Anthony ; Chapelon, Jean-Yves

Author_Institution

Vermon SA, Tours, France

fYear

2012

fDate

7-10 Oct. 2012

Firstpage

81

Lastpage

84

Abstract

In this paper, multi-element arrays based on cMUT and piezoelectric technologies, using the same geometry, have been realized. The first part of the paper is focused on comparing both in terms of imaging performances. The CMUT is shown to be lower in sensivity but better in terms of bandwidth and resolution. The second part of the paper investigates the ability of the CMUT array for HIFU applications. The dual imaging-HIFU capability of the cMUT array is demonstrated. This is a new feature of the CMUT technology, as piezoelectric transducers are designed with a trade-off between bandwidth and transduction efficiency.

Keywords

image sensors; micromachining; microsensors; piezoelectric transducers; sensor arrays; ultrasonic transducer arrays; dual modality imaging-HIFU application; geometry; high intensity focused ultrasound application; imaging performance; micromachined ultrasonic transducer; multielement cMUT array; piezoelectric technology; piezoelectric transducer; Acoustics; Bandwidth; Heating; Imaging; Probes; Temperature measurement; Transducers; HIFU; cMUT; transducer; ultrasound imaging;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2012 IEEE International

Conference_Location

Dresden

ISSN

1948-5719

Print_ISBN

978-1-4673-4561-3

Type

conf

DOI

10.1109/ULTSYM.2012.0020

Filename

6562042