Title :
Ultra-wideband surface acoustic wave resonators using Pb(Mn1/3Nb2/3)O3-PbTiO3 single crystals
Author :
Jing Chen ; Jiansong Liu ; Hashimoto, Ken-ya ; Omori, Tatsuya ; Abn, Changjun
Author_Institution :
Grad. Sch. of Eng., Chiba Univ., Chiba, Japan
Abstract :
One-port SAW resonators were designed and fabricated on YX-PMN-PT substrate with Cu electrode, the measured results demonstrated the large electromechanical coupling factor K2 of 60.5%. The strong spurious Rayleigh-type SAW was also observed and should be suppressed. Au electrode with large thickness of 6%λ was applied and decreased it into very small value. With further increasing the Au electrode thickness into 10%λ, the spurious Rayleigh-type SAW was shown to be sufficiently suppressed without seriously deteriorating the large K2 of the main response. The temperature stability and homogeneity of the substrate were also evaluated.
Keywords :
Rayleigh waves; copper; electrochemical electrodes; gold; interference suppression; lead compounds; manganese compounds; niobium compounds; surface acoustic wave resonators; titanium compounds; Au; Au electrode; Cu; Cu electrode; Pb(Mn0.33Nb0.67)O3-PbTiO3; YX PMN PT substrate; electromechanical coupling factor; homogeneity; one port SAW resonators; spurious Rayleigh type SAW; temperature stability; Abstracts; Gold; Resonant frequency; Surface acoustic waves; Thickness measurement;
Conference_Titel :
Ultrasonics Symposium (IUS), 2012 IEEE International
Conference_Location :
Dresden
Print_ISBN :
978-1-4673-4561-3
DOI :
10.1109/ULTSYM.2012.0139
