Ultra-wideband surface acoustic wave resonators using Pb(Mn1/3Nb2/3)O3-PbTiO3 single crystals

Author

Jing Chen ; Jiansong Liu ; Hashimoto, Ken-ya ; Omori, Tatsuya ; Abn, Changjun

Author_Institution

Grad. Sch. of Eng., Chiba Univ., Chiba, Japan

fYear

2012

fDate

7-10 Oct. 2012

Firstpage

1

Lastpage

4

Abstract

One-port SAW resonators were designed and fabricated on YX-PMN-PT substrate with Cu electrode, the measured results demonstrated the large electromechanical coupling factor K² of 60.5%. The strong spurious Rayleigh-type SAW was also observed and should be suppressed. Au electrode with large thickness of 6%λ was applied and decreased it into very small value. With further increasing the Au electrode thickness into 10%λ, the spurious Rayleigh-type SAW was shown to be sufficiently suppressed without seriously deteriorating the large K² of the main response. The temperature stability and homogeneity of the substrate were also evaluated.

Keywords

Rayleigh waves; copper; electrochemical electrodes; gold; interference suppression; lead compounds; manganese compounds; niobium compounds; surface acoustic wave resonators; titanium compounds; Au; Au electrode; Cu; Cu electrode; Pb(Mn_0.33Nb_0.67)O₃-PbTiO₃; YX PMN PT substrate; electromechanical coupling factor; homogeneity; one port SAW resonators; spurious Rayleigh type SAW; temperature stability; Abstracts; Gold; Resonant frequency; Surface acoustic waves; Thickness measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2012 IEEE International

Conference_Location

Dresden

ISSN

1948-5719

Print_ISBN

978-1-4673-4561-3

Type

conf

DOI

10.1109/ULTSYM.2012.0139

Filename

6562102