DocumentCode
620791
Title
Polycrystalline PZT film on porous Ti substrate synthesized by Ultrasonic Assisted Hydrothermal Method
Author
Ohtal, Kanako ; Isobel, Gaku ; Bornmann, Peter ; Hemsel, Tobias ; Morita, Takahito
Author_Institution
Univ. of Tokyo, Kashiwa, Japan
fYear
2012
fDate
7-10 Oct. 2012
Firstpage
186
Lastpage
189
Abstract
The hydrothermal method utilizes a solution-based chemical reaction to synthesize piezoelectric films. We proposed an ultrasonic irradiation during the hydrothermal synthesis, named an Ultrasonic Assisted Hydrothermal Method (UAHTM). In this study, two topics are reported, the optimum ultrasonic irradiation period for getting thicker PZT film and the PZT deposition on porous Ti substrate by UAHTM.
Keywords
lead compounds; liquid phase deposition; piezoelectric thin films; ultrasonic applications; PZT; PZT deposition; Ti; hydrothermal synthesis; optimum ultrasonic irradiation period; piezoelectric films; polycrystalline PZT film; porous Ti substrate; solution-based chemical reaction; ultrasonic assisted hydrothermal method; Acoustics; Actuators; Films; Piezoelectric polarization; Substrates; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium (IUS), 2012 IEEE International
Conference_Location
Dresden
ISSN
1948-5719
Print_ISBN
978-1-4673-4561-3
Type
conf
DOI
10.1109/ULTSYM.2012.0046
Filename
6562150
Link To Document