DocumentCode
620867
Title
Control and monitoring of dynamic collapse event in cMUTs arrays for therapeutic applications
Author
Gross, Dominic ; Boulme, Audren ; Perroteau, Marie ; Certon, Dominique ; Senegond, N.
Author_Institution
Univ. Francois Rabelais de Tours, Tours, France
fYear
2012
fDate
7-10 Oct. 2012
Firstpage
1830
Lastpage
1833
Abstract
In this paper, the displacement behavior of the cMUT is analyzed thanks to a time domain model. The nonlinear components in the response spectrum with different excitation parameters are compared. A method based on the addition of a series impedance to the cMUT, which permits to decrease the harmonic components and enhance the maximum displacement swept by the diaphragm, is applied in a therapeutic context. The benefits of such a method are pointed out and discussed. After that, experimental measurements are performed to confirm these advantages, and discussed.
Keywords
biomedical ultrasonics; capacitive sensors; micromachining; microsensors; time-domain analysis; ultrasonic transducers; cMUT arrays; diaphragm; dynamic collapse event control; dynamic collapse event monitoring; excitation parameter; series impedance; therapeutic application; time domain model; Acoustics; Harmonic analysis; Load modeling; Mathematical model; Measurement by laser beam; Resistors; Time-domain analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium (IUS), 2012 IEEE International
Conference_Location
Dresden
ISSN
1948-5719
Print_ISBN
978-1-4673-4561-3
Type
conf
DOI
10.1109/ULTSYM.2012.0459
Filename
6562281
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