• DocumentCode
    620867
  • Title

    Control and monitoring of dynamic collapse event in cMUTs arrays for therapeutic applications

  • Author

    Gross, Dominic ; Boulme, Audren ; Perroteau, Marie ; Certon, Dominique ; Senegond, N.

  • Author_Institution
    Univ. Francois Rabelais de Tours, Tours, France
  • fYear
    2012
  • fDate
    7-10 Oct. 2012
  • Firstpage
    1830
  • Lastpage
    1833
  • Abstract
    In this paper, the displacement behavior of the cMUT is analyzed thanks to a time domain model. The nonlinear components in the response spectrum with different excitation parameters are compared. A method based on the addition of a series impedance to the cMUT, which permits to decrease the harmonic components and enhance the maximum displacement swept by the diaphragm, is applied in a therapeutic context. The benefits of such a method are pointed out and discussed. After that, experimental measurements are performed to confirm these advantages, and discussed.
  • Keywords
    biomedical ultrasonics; capacitive sensors; micromachining; microsensors; time-domain analysis; ultrasonic transducers; cMUT arrays; diaphragm; dynamic collapse event control; dynamic collapse event monitoring; excitation parameter; series impedance; therapeutic application; time domain model; Acoustics; Harmonic analysis; Load modeling; Mathematical model; Measurement by laser beam; Resistors; Time-domain analysis;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium (IUS), 2012 IEEE International
  • Conference_Location
    Dresden
  • ISSN
    1948-5719
  • Print_ISBN
    978-1-4673-4561-3
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2012.0459
  • Filename
    6562281