GDS2M: Preprocessing tool for MEMS devices

Author

Alexandru, Andrei ; Lup, Sorin ; Dita, Bogdan

Author_Institution

Politeh. Univ. of Bucharest, Bucharest, Romania

fYear

2013

fDate

23-25 May 2013

Firstpage

1

Lastpage

4

Abstract

This paper proposes an effective software tool that extracts geometric information of Micro-Electro-Mechanical Systems (MEMS) or other integrated circuits (IC) devices, and exports it to data structures in MATLAB, aiding the electromagnetic modeling. The use of this preprocessing tool is illustrated for a capacitive RF shunt switch from the literature. Finally, this tool is included in the RF simulation flow of the switch and its validation consists of the comparison between the computed frequency characteristic and the results from the literature.

Keywords

capacitors; circuit simulation; computational electromagnetics; computational geometry; data structures; electronic engineering computing; information retrieval; integrated circuit modelling; microswitches; microwave integrated circuits; millimetre wave integrated circuits; software tools; GDSII file; IC device; MEMS device; Matlab; RF simulation; capacitive RF shunt switch; data structure; electromagnetic modeling; frequency characteristic computation; geometric information extraction; integrated circuit device; microelectromechanical system; preprocessing tool; software tool; Integrated circuit modeling; Layout; Magnetic domains; Micromechanical devices; Radio frequency; Software tools; Switches; GDSII; RF MEMS; RF simulation; geometric preprocessing;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Topics in Electrical Engineering (ATEE), 2013 8th International Symposium on

Conference_Location

Bucharest

Print_ISBN

978-1-4673-5979-5

Type

conf

DOI

10.1109/ATEE.2013.6563451

Filename

6563451