Title :
Multiobjective design of transverse flux induction heating device for semiconductor processing
Author :
Petrescu, Camelia ; Ferariu, Lavinia
Abstract :
A multi-objective optimization of an induction device used for heating thin flat semiconductor plates is performed. Two conflicting targets are considered: increase of the uniformity of dissipated power (and thus of the temperature) and the increase of total power absorbed by the semiconductor. Three optimization techniques, mono-objective aggregation, Deb´s algorithm and cluster groups, all implemented using genetic algorithms, are used.
Keywords :
genetic algorithms; induction heating; semiconductor technology; Deb algorithm; cluster groups; genetic algorithms; induction device; monoobjective aggregation; multiobjective optimization; power absorption; power dissipation; semiconductor processing; thin flat semiconductor plate heating; transverse flux induction heating device; Clustering algorithms; Coils; Heating; Linear programming; Optimization; Sociology; Statistics; genetic algorithms; induction heating; multiobjective optimization;
Conference_Titel :
Advanced Topics in Electrical Engineering (ATEE), 2013 8th International Symposium on
Conference_Location :
Bucharest
Print_ISBN :
978-1-4673-5979-5
DOI :
10.1109/ATEE.2013.6563512
