DocumentCode
622925
Title
Evaluation of effective permittivity and permeability for dummy metal fills in a CMOS chip using capacitor and inductor model
Author
Hirano, Takuichi ; Okada, Kenichi ; Hirokawa, Jiro ; Ando, Makoto
Author_Institution
Dept. of Int. Dev. Eng., Tokyo Inst. of Technol., Tokyo, Japan
fYear
2013
fDate
20-24 May 2013
Firstpage
695
Lastpage
697
Abstract
Evaluation method of effective permittivity and permeability for dummy metal fills in a CMOS chip is proposed. For each component of anisotropic material property, capacitor and inductor models are considered for a unit-cell of dummy metal fills. The input impedance is obtained by electromagnetic analysis. Effective permittivity and permeability can be evaluated from the input impedance.
Keywords
CMOS integrated circuits; capacitors; inductors; permeability; permittivity; CMOS chip; anisotropic material property; capacitor; dummy metal fills; effective permittivity evaluation method; electromagnetic analysis; inductor model; input impedance; permeability; unit-cell; CMOS integrated circuits; Impedance; Inductors; Mathematical model; Metals; Permeability; Permittivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Electromagnetic Theory (EMTS), Proceedings of 2013 URSI International Symposium on
Conference_Location
Hiroshima
Print_ISBN
978-1-4673-4939-0
Type
conf
Filename
6565833
Link To Document