Title :
Evaluation of effective permittivity and permeability for dummy metal fills in a CMOS chip using capacitor and inductor model
Author :
Hirano, Takuichi ; Okada, Kenichi ; Hirokawa, Jiro ; Ando, Makoto
Author_Institution :
Dept. of Int. Dev. Eng., Tokyo Inst. of Technol., Tokyo, Japan
Abstract :
Evaluation method of effective permittivity and permeability for dummy metal fills in a CMOS chip is proposed. For each component of anisotropic material property, capacitor and inductor models are considered for a unit-cell of dummy metal fills. The input impedance is obtained by electromagnetic analysis. Effective permittivity and permeability can be evaluated from the input impedance.
Keywords :
CMOS integrated circuits; capacitors; inductors; permeability; permittivity; CMOS chip; anisotropic material property; capacitor; dummy metal fills; effective permittivity evaluation method; electromagnetic analysis; inductor model; input impedance; permeability; unit-cell; CMOS integrated circuits; Impedance; Inductors; Mathematical model; Metals; Permeability; Permittivity;
Conference_Titel :
Electromagnetic Theory (EMTS), Proceedings of 2013 URSI International Symposium on
Conference_Location :
Hiroshima
Print_ISBN :
978-1-4673-4939-0
