DocumentCode
622985
Title
Scatterometry of diffraction gratings: Time-and-frequency domains technique
Author
Sirenko, Kostyantyn ; Granet, Gerard ; Melezhik, P. ; Yashina, N.
Author_Institution
King Abdullah Univ. of Sci. & Technol. (KAUST), Thuwal, Saudi Arabia
fYear
2013
fDate
20-24 May 2013
Firstpage
950
Lastpage
953
Abstract
The paper discusses capabilities of a novel theoretical and numerical-modeling based approach to scatterometry problems. This approach allows reliable detection of deviations in gratings´ critical dimensions during manufacturing process. The core of the approach is simultaneous analysis in time and frequency domains and one-to-one correspondence between electromagnetics characteristics and geometrical/material properties of gratings.
Keywords
diffraction gratings; frequency-domain analysis; light scattering; time-domain analysis; critical dimensions; diffraction gratings; frequency domain analysis; manufacturing process; numerical modeling; scatterometry; time domain analysis; Dielectrics; Gratings; Monitoring; Radar measurements; Reflection; Resonant frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Electromagnetic Theory (EMTS), Proceedings of 2013 URSI International Symposium on
Conference_Location
Hiroshima
Print_ISBN
978-1-4673-4939-0
Type
conf
Filename
6565901
Link To Document