Fabrication and package of microfluidic dielectrophoretic chip for trapping two particles

Author

Tao Chen ; Mingqiang Pan ; Jizhu Liu ; Yangjun Wang ; Liguo Chen ; Lining Sun ; Shaoqian Li

Author_Institution

Robot. & Microsyst. Center, Soochow Univ., Suzhou, China

fYear

2013

fDate

19-21 June 2013

Firstpage

1599

Lastpage

1603

Abstract

A novel microfluidic dielectrophoretic chip has been fabricated and packed to trap the small particles with different sizes. In order to trapping different particles, the microfluidic chip integrated with U-shaped column and microelectrodes is designed and fabricated. In this paper, the particular process of fabricate micro-electrodes, micro U-shaped columns and microchannels is presented. The results show that the chip can complete pairing two particles with different sizes successfully.

Keywords

bioMEMS; cellular biophysics; electronics packaging; electrophoresis; lab-on-a-chip; microelectrodes; microfabrication; microfluidics; cell fusion; microU-shaped column fabrication; microchannel fabrication; microelectrode fabrication; microfluidic dielectrophoretic chip fabrication; microfluidic dielectrophoretic chip package; two particle trapping; Conferences; Industrial electronics; DEP; Microfluidic chip; particle trapping;

fLanguage

English

Publisher

ieee

Conference_Titel

Industrial Electronics and Applications (ICIEA), 2013 8th IEEE Conference on

Conference_Location

Melbourne, VIC

Print_ISBN

978-1-4673-6320-4

Type

conf

DOI

10.1109/ICIEA.2013.6566624

Filename

6566624