Title :
Fabrication and package of microfluidic dielectrophoretic chip for trapping two particles
Author :
Tao Chen ; Mingqiang Pan ; Jizhu Liu ; Yangjun Wang ; Liguo Chen ; Lining Sun ; Shaoqian Li
Author_Institution :
Robot. & Microsyst. Center, Soochow Univ., Suzhou, China
Abstract :
A novel microfluidic dielectrophoretic chip has been fabricated and packed to trap the small particles with different sizes. In order to trapping different particles, the microfluidic chip integrated with U-shaped column and microelectrodes is designed and fabricated. In this paper, the particular process of fabricate micro-electrodes, micro U-shaped columns and microchannels is presented. The results show that the chip can complete pairing two particles with different sizes successfully.
Keywords :
bioMEMS; cellular biophysics; electronics packaging; electrophoresis; lab-on-a-chip; microelectrodes; microfabrication; microfluidics; cell fusion; microU-shaped column fabrication; microchannel fabrication; microelectrode fabrication; microfluidic dielectrophoretic chip fabrication; microfluidic dielectrophoretic chip package; two particle trapping; Conferences; Industrial electronics; DEP; Microfluidic chip; particle trapping;
Conference_Titel :
Industrial Electronics and Applications (ICIEA), 2013 8th IEEE Conference on
Conference_Location :
Melbourne, VIC
Print_ISBN :
978-1-4673-6320-4
DOI :
10.1109/ICIEA.2013.6566624
