Title :
A sticking-free and high-quality factor MEMS variable capacitor with metal-insulator-metal dots as dielectric layer
Author :
Nakazawa, Fumihiko ; Shimanouchi, Takeaki ; Katsuki, Takayuki ; Toyoda, O. ; Ueda, Shuichi
Author_Institution :
Assoc. of Super-Adv. Electron. Technol., Japan Fujitsu Labs. Ltd., Akashi, Japan
Abstract :
This paper describes a novel design of a MEMS variable capacitor with high operating reliability and high quality factor. Metal-Insulator-Metal (MIM) dots between a fixed electrode and a movable electrode in a variable capacitor is proposed. A Fabricated MEMS capacitor was operated one billion or more times without sticking. It demonstrated a high quality factor of 200 at 0.5 pF. It was experimentally confirmed that MIM dots effectively achieve a sticking-free and high-quality-factor MEMS variable capacitor.
Keywords :
MIM devices; Q-factor; capacitors; micromechanical devices; reliability; MIM dots; dielectric layer; fabricated MEMS capacitor; fixed electrode; high-quality factor MEMS variable capacitor; metal-insulator-metal dots; movable electrode; operating reliability; Capacitance; Capacitors; Electrodes; Metals; Micromechanical devices; Radio frequency; MEMS; MIM; RF; capacitor; sticking; tunable;
Conference_Titel :
Radio Frequency Integrated Circuits Symposium (RFIC), 2013 IEEE
Conference_Location :
Seattle, WA
Print_ISBN :
978-1-4673-6059-3
DOI :
10.1109/RFIC.2013.6569614
