A sticking-free and high-quality factor MEMS variable capacitor with metal-insulator-metal dots as dielectric layer

Author

Nakazawa, Fumihiko ; Shimanouchi, Takeaki ; Katsuki, Takayuki ; Toyoda, O. ; Ueda, Shuichi

Author_Institution

Assoc. of Super-Adv. Electron. Technol., Japan Fujitsu Labs. Ltd., Akashi, Japan

fYear

2013

fDate

2-4 June 2013

Firstpage

397

Lastpage

400

Abstract

This paper describes a novel design of a MEMS variable capacitor with high operating reliability and high quality factor. Metal-Insulator-Metal (MIM) dots between a fixed electrode and a movable electrode in a variable capacitor is proposed. A Fabricated MEMS capacitor was operated one billion or more times without sticking. It demonstrated a high quality factor of 200 at 0.5 pF. It was experimentally confirmed that MIM dots effectively achieve a sticking-free and high-quality-factor MEMS variable capacitor.

Keywords

MIM devices; Q-factor; capacitors; micromechanical devices; reliability; MIM dots; dielectric layer; fabricated MEMS capacitor; fixed electrode; high-quality factor MEMS variable capacitor; metal-insulator-metal dots; movable electrode; operating reliability; Capacitance; Capacitors; Electrodes; Metals; Micromechanical devices; Radio frequency; MEMS; MIM; RF; capacitor; sticking; tunable;

fLanguage

English

Publisher

ieee

Conference_Titel

Radio Frequency Integrated Circuits Symposium (RFIC), 2013 IEEE

Conference_Location

Seattle, WA

ISSN

1529-2517

Print_ISBN

978-1-4673-6059-3

Type

conf

DOI

10.1109/RFIC.2013.6569614

Filename

6569614