Title :
Novel automatic offset cancellation approach for capacitive CMOS MEMS accelerometers
Author :
Po-Chang Wu ; Bin-Da Liu ; Yu-Chen Teng ; Chih-Yuan Yeh ; Sheng-Hsiang Tseng ; Hann-Huei Tsai ; Ying-Zong Juang
Author_Institution :
Inst. of Electron. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
Abstract :
A monolithic inertial sensor based automatic offset calibration technique is proposed in this paper. With this technique, the output offset voltage caused by sensor and amplifier mismatches is trimmed from 600mV down to 50mV from the measurement results. For providing larger dynamic range, a programmable gain control amplifier is included in this architecture. This inertial sensor is implemented by the 0.18 μm CMOS MEMS process and the total chip area is 1.3 × 1.3 mm2.
Keywords :
CMOS integrated circuits; accelerometers; amplifiers; calibration; capacitive sensors; integrated circuit measurement; microsensors; monolithic integrated circuits; programmable controllers; automatic offset calibration technique; automatic offset cancellation approach; capacitive CMOS MEMS accelerometer; monolithic inertial sensor; output offset voltage; programmable gain control amplifier; size 0.18 mum; voltage 50 mV; voltage 600 mV; Accelerometers; CMOS integrated circuits; Capacitance; Capacitors; Electronics packaging; Micromechanical devices; Sensors;
Conference_Titel :
Consumer Electronics (ISCE), 2013 IEEE 17th International Symposium on
Conference_Location :
Hsinchu
Print_ISBN :
978-1-4673-6198-9
DOI :
10.1109/ISCE.2013.6570154
