• DocumentCode
    625958
  • Title

    LaB6 cathode workfunction evaluation

  • Author

    Katsap, V.

  • Author_Institution
    NuFlare Technol., Hopewell Jnctn, NY, USA
  • fYear
    2013
  • fDate
    21-23 May 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    LaB6 cathode is the emitter of choice in electron beam lithography tools. In commercial LaB6 cathodes, the (100) crystalline plane is used as the emissive surface. Values of (100) and surrounding crystalline planes workfunction (WF) vary widely in literature. We have devised and implemented a simple, robust technique for evaluating LaB6 cathode workfunction.
  • Keywords
    cathodes; electron beam lithography; lanthanum compounds; work function; (100) crystalline plane; LaB6 cathode workfunction evaluation; LaB6; electron beam lithography tools; Abstracts; Cathodes; Layout; Linear approximation; Lithography; Materials; LaB6 cathode; e-beam lithography; workfunction;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Electronics Conference (IVEC), 2013 IEEE 14th International
  • Conference_Location
    Paris
  • Print_ISBN
    978-1-4673-5976-4
  • Type

    conf

  • DOI
    10.1109/IVEC.2013.6570897
  • Filename
    6570897
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=625958