Title :
The field emission properties of diamond-like carbon film prepared by filtered cathodic vacuum arc
Author :
Wang Chao ; Zhao Zhiwei ; Chen YongQiang
Author_Institution :
Sch. of Electron. Sci. & Eng., Southeast Univ., Nanjing, China
Abstract :
The diamond-like carbon films were prepared by filtered cathodic vacuum arc system. Surface morphology and microstructure of the films were investigated by atomic force microscope and Raman spectrum. The field emission properties of the film were tested under vacuum condition, and the turn-on field was found to be 1.3V/μm.
Keywords :
Raman spectra; atomic force microscopy; diamond-like carbon; field emission; vacuum arcs; Raman spectrum; atomic force microscope; diamond-like carbon film; field emission properties; filtered cathodic vacuum arc; microstructure; surface morphology; vacuum condition; Carbon dioxide; Cathodes; Diamond-like carbon; Films; Glass; Thermal stability; AFM; Filtered Cathodic Vacuum Arc; Raman spectrum; diamond-like carbon film; field emission;
Conference_Titel :
Vacuum Electronics Conference (IVEC), 2013 IEEE 14th International
Conference_Location :
Paris
Print_ISBN :
978-1-4673-5976-4
DOI :
10.1109/IVEC.2013.6570903
