Title :
Breakthrough UV-LIGA microfabrication of sub-mm and THz circuits
Author :
Joye, Colin D. ; Cook, Alan M. ; Calame, Jeffrey P. ; Abe, David K. ; Levush, Baruch
Author_Institution :
U.S. Naval Res. Lab., Washington, DC, USA
Abstract :
The U.S. Naval Research Laboratory has been developing a novel UV-LIGA process to create amplifier circuits from 100 GHz through the THz. A 670 GHz EIK ladder test piece has been successfully fabricated with a 0.004 inch diameter beam tunnel, and demonstrates sub-micron fabrication accuracies. The technique is being extended to showcase capabilities at 850 GHz, and 1.03, 1.35 and 1.50 THz.
Keywords :
LIGA; amplifiers; microfabrication; millimetre wave amplifiers; EIK ladder test piece; THz circuits; U.S. Naval Research Laboratory; UV-LIGA microfabrication; amplifier circuits; frequency 1.03 THz; frequency 1.35 THz; frequency 1.5 THz; frequency 670 GHz; frequency 850 GHz; size 0.004 in; Copper; Fabrication; Klystrons; Polymers; Standards; Wideband; Wires;
Conference_Titel :
Vacuum Electronics Conference (IVEC), 2013 IEEE 14th International
Conference_Location :
Paris
Print_ISBN :
978-1-4673-5976-4
DOI :
10.1109/IVEC.2013.6571006
