DocumentCode
626103
Title
Rayleigh scattering measurement of residual gas inside microwave vacuum electronic devices
Author
Hui-yu Yuan ; Chen Wu ; Feng Wang ; Ningfeng Bai ; Hehong Fan ; Pu Wei ; Xinqun Zhao ; Xiao-han Sun
Author_Institution
Res. Center for Electron. Device & Syst. Reliability, Southeast Univ., Nanjing, China
fYear
2013
fDate
21-23 May 2013
Firstpage
1
Lastpage
2
Abstract
We propose a method to measure the residual gas in microwave vacuum electronic devices (VED) in long-term storage based on Rayleigh scattering, and establish the relation between the gas state and the intensity of scattered light. This method can be used to monitor the status of VED in long-term storage.
Keywords
Rayleigh scattering; microwave devices; spectrochemical analysis; vacuum microelectronics; Rayleigh scattering; gas state; long-term storage; microwave VED; microwave vacuum electronic devices; residual gas; scattered light intensity; Detectors; Educational institutions; Microwave devices; Microwave measurement; Rayleigh scattering; Windows; Rayleigh scattering; vacuum electronic devices residual gas;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electronics Conference (IVEC), 2013 IEEE 14th International
Conference_Location
Paris
Print_ISBN
978-1-4673-5976-4
Type
conf
DOI
10.1109/IVEC.2013.6571099
Filename
6571099
Link To Document