Title :
Comprehensive Study of N-Channel and P-Channel Twin Poly-Si FinFET Nonvolatile Memory
Author :
Mu-Shih Yeh ; Yung-Chun Wu ; Kuan-Cheng Liu ; Min-Feng Hung ; Yi-Ruei Jhan ; Nan-Heng Lu ; Ming-Hsien Chung ; Min-Hsin Wu
Author_Institution :
Dept. of Eng. & Syst. Sci., Nat. Tsing Hua Univ., Hsinchu, Taiwan
Abstract :
This paper develops the n-channel and p-channel twin poly-Si fin field-effect transistor nonvolatile memory with a structure that is composed of Ω-gate nanowires (NWs). Experimental results demonstrate that the NW device has superior memory characteristics because its Ω-gate structure provides a large memory window and high program/erase efficiency. With respect to endurance and retention, the memory window can be maintained at 3.6 V after 104 program and erase cycles, and after 10 years, the charge is 53.4% of its initial value. In the future, it can be applied in multilayer Si ICs in fully functional system-on-panel, active-matrix liquid-crystal display and 3-D stacked flash memory.
Keywords :
MOSFET; nanowires; random-access storage; silicon; 3D stacked flash memory; N-channel nonvolatile memory; P-channel nonvolatile memory; Si; active matrix liquid crystal display; field effect transistor; memory window; nanowires; program-erase efficiency; twin poly-Si FinFET; Educational institutions; FinFETs; Flash memories; Logic gates; Nonvolatile memory; Thin film transistors; 3-D; ??-gate; Fin field-effect transistor (FinFET); flash memory; nanowires (NWs); nonvolatile memory (NVM); twin poly-Si;
Journal_Title :
Nanotechnology, IEEE Transactions on
DOI :
10.1109/TNANO.2014.2323983
