Title :
RF MEMS capacitor for microwave applications
Author :
Chatim, R. ; Ghahremani, Reza ; Zamudio, A. ; Sandhagen, Carl ; Bangert, Axel ; Viereck, V. ; Jaekel, Arunita ; Hillmer, Hartmut
Author_Institution :
Microwave Electron. Lab., Univ. of Kassel, Kassel, Germany
Abstract :
Due to miniaturization and advantages offered, RF MEMS capacitors have recently been developed for utilization in microwave circuits, i.e., wireless communication applications such as filters, matching networks, and phase shifters among others. Throughout this presented work two-plate RF MEMS capacitor networks with two different number of membranes are presented. Both are designed with the same dimension of membrane and suspension. The measurement result shows resonant frequency and capacitance of each capacitor network indicated by impedances.
Keywords :
capacitors; micromechanical devices; microwave circuits; filters; matching networks; membranes; microwave applications; microwave circuits; phase shifters; resonant frequency; suspension; two-plate RF MEMS capacitor networks; wireless communication applications; Atmospheric modeling; Capacitors; Electrodes; Frequency measurement; Micromechanical devices; Radio frequency; Suspensions; RF MEMS capacitor; S-Parameter measurement;
Conference_Titel :
Information and Communication Technology (ICoICT), 2013 International Conference of
Conference_Location :
Bandung
Print_ISBN :
978-1-4673-4990-1
DOI :
10.1109/ICoICT.2013.6574602
