Title :
Wafer level packaging for ultra thin (6 μm) high brightness LEDs using embedding technology
Author :
Kleff, J. ; Topper, Michael ; Dietrich, L. ; Oppermann, H. ; Herrmann, S.
Author_Institution :
Tech. Univ. Berlin, Berlin, Germany
Abstract :
Due to various advantages, as high efficiency, compactness and color variability, high brightness LEDs become more and more important for several lighting applications. In this paper, we discuss a completely new packaging approach of ultra thin high brightness LEDs which is applicable on wafer level. Due to the wire bond free manufacturing process as well as the lack of silicone encapsulants and adhesives it promises better reliability. The process flow is described in detail. The feasibility is fully demonstrated and confirmed by cross sections. First electro-optical characterization results are presented.
Keywords :
elemental semiconductors; light emitting diodes; silicon; wafer level packaging; LED; Si; electro-optical characterization; embedding technology; wafer level packaging; wire bond free manufacturing process; Copper; Glass; Light emitting diodes; Lithography; Metallization; Substrates; Tin;
Conference_Titel :
Electronic Components and Technology Conference (ECTC), 2013 IEEE 63rd
Conference_Location :
Las Vegas, NV
Print_ISBN :
978-1-4799-0233-0
DOI :
10.1109/ECTC.2013.6575730