DocumentCode :
628576
Title :
Simulation of electro-migration through peridynamics
Author :
Oterkus, Selda ; Fox, John ; Madenci, Erdogan
Author_Institution :
Aerosp. & Mech. Eng. Dept., Univ. of Arizona, Tucson, AZ, USA
fYear :
2013
fDate :
28-31 May 2013
Firstpage :
1488
Lastpage :
1493
Abstract :
Thin film metallic conductors or interconnects are subjected to increasingly high current densities as the feature sizes decrease that can lead to failure of interconnects in moderately short times. Modelling of failure in micro electronic materials involves several challenges such as electro-migration and stress driven diffusion. These physical phenomena are usually negligible in conventional applications. However, the material within an interconnect is subjected to severe thermal-mechanical and electrical loading. In this study, the peridynamic (PD) framework is applied to model the electro-migration process by coupling physical fields of mechanical deformation, heat transfer, electrical potential distribution, and vacancy diffusion simultaneously.
Keywords :
deformation; electromigration; failure analysis; heat transfer; integrated circuit interconnections; metallic thin films; PD framework; electrical loading; electrical potential distribution; electromigration simulation; failure modelling; heat transfer; mechanical deformation; microelectronic materials; peridynamic framework; thermal-mechanical loading; thin film metallic conductors; thin film metallic interconnects; vacancy diffusion; Current density; Electric potential; Finite element analysis; Heating; Materials; Stress; Strips;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Components and Technology Conference (ECTC), 2013 IEEE 63rd
Conference_Location :
Las Vegas, NV
ISSN :
0569-5503
Print_ISBN :
978-1-4799-0233-0
Type :
conf
DOI :
10.1109/ECTC.2013.6575768
Filename :
6575768
Link To Document :
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