• DocumentCode
    628752
  • Title

    Theoretical analysis of piezoelectric cantilever sensor

  • Author

    Khan, A.B. ; Siddiqui, M.J. ; Singh, Moirangthem Marjit

  • Author_Institution
    Dept. of Electron. Eng., AMU, Aligarh, India
  • fYear
    2013
  • fDate
    4-6 June 2013
  • Firstpage
    1
  • Lastpage
    6
  • Abstract
    In this article, the sensing effect of piezoelectric cantilever sensor subjected to mechanical excitation are discussed. General analytical expression relating voltage generations to applied mechanical input excitations are derived based on the constitutive equations of these bending devices. It is observe that the clamping effect of each component in piezoelectric cantilever devices decreases the dielectric constant. The sensitivities of double layer piezoelectric cantilever sensor are higher as compare to the triple layer piezoelectric cantilever sensor.
  • Keywords
    cantilevers; electric sensing devices; piezoelectric devices; clamping effect; mechanical excitation; piezoelectric cantilever sensor; voltage generation; Dielectric constant; Force; Microelectronics; Piezoelectric materials; Renewable energy sources; Sensitivity; Cantilever; PZT; Piezoelectric sensor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Emerging Research Areas and 2013 International Conference on Microelectronics, Communications and Renewable Energy (AICERA/ICMiCR), 2013 Annual International Conference on
  • Conference_Location
    Kanjirapally
  • Print_ISBN
    978-1-4673-5150-8
  • Type

    conf

  • DOI
    10.1109/AICERA-ICMiCR.2013.6575947
  • Filename
    6575947