DocumentCode
628752
Title
Theoretical analysis of piezoelectric cantilever sensor
Author
Khan, A.B. ; Siddiqui, M.J. ; Singh, Moirangthem Marjit
Author_Institution
Dept. of Electron. Eng., AMU, Aligarh, India
fYear
2013
fDate
4-6 June 2013
Firstpage
1
Lastpage
6
Abstract
In this article, the sensing effect of piezoelectric cantilever sensor subjected to mechanical excitation are discussed. General analytical expression relating voltage generations to applied mechanical input excitations are derived based on the constitutive equations of these bending devices. It is observe that the clamping effect of each component in piezoelectric cantilever devices decreases the dielectric constant. The sensitivities of double layer piezoelectric cantilever sensor are higher as compare to the triple layer piezoelectric cantilever sensor.
Keywords
cantilevers; electric sensing devices; piezoelectric devices; clamping effect; mechanical excitation; piezoelectric cantilever sensor; voltage generation; Dielectric constant; Force; Microelectronics; Piezoelectric materials; Renewable energy sources; Sensitivity; Cantilever; PZT; Piezoelectric sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Emerging Research Areas and 2013 International Conference on Microelectronics, Communications and Renewable Energy (AICERA/ICMiCR), 2013 Annual International Conference on
Conference_Location
Kanjirapally
Print_ISBN
978-1-4673-5150-8
Type
conf
DOI
10.1109/AICERA-ICMiCR.2013.6575947
Filename
6575947
Link To Document