DocumentCode :
62876
Title :
{\\rm Ga}_{2}{\\rm O}_{3} Nanowire Photodetector Prepared on {\\rm SiO}_{2}/{\\rm Si} Templ
Author :
Wu, Yijen L. ; Shoou-Jinn Chang ; Weng, W.Y. ; Liu, Chi Harold ; Tsai, Tsung Ying ; Hsu, Cheng Liang ; Chen, K.C.
Author_Institution :
Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
Volume :
13
Issue :
6
fYear :
2013
fDate :
Jun-13
Firstpage :
2368
Lastpage :
2373
Abstract :
The authors report the growth of β-Ga2O3 nanowires using a vapor phase transport method on SiO2/Si template. It is found that average diameter, average length, and density of the nanowires all increased as we increase the growth temperature. β-Ga2O3 nanowire solar-blind photodetectors with a sharp cutoff at 255 nm are also fabricated. With an incident light wavelength of 255 nm and an applied bias of 5 V, it is found that measured responsivity of the photodetector prepared at 950°C is 3.43×102O3 A/W.
Keywords :
gallium compounds; nanowires; photodetectors; silicon compounds; Ga2O3; average diameter; average length; growth temperature; incident light wavelength; nanowire photodetector; sharp cutoff; vapor phase transport method; voltage 5 V; wavelength 255 nm; Educational institutions; Gold; Nanoscale devices; Photodetectors; Semiconductor device measurement; Silicon; Temperature measurement; $betahbox{-}{rm Ga}_{2}{rm O}_{3}$; UV photodetectors; nanowire;
fLanguage :
English
Journal_Title :
Sensors Journal, IEEE
Publisher :
ieee
ISSN :
1530-437X
Type :
jour
DOI :
10.1109/JSEN.2013.2247996
Filename :
6466350
Link To Document :
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