DocumentCode
630228
Title
New calibration solutions for multi-channel probes using an added port for thru measurements
Author
Kooho Jung ; Andrews, Michael F.
Author_Institution
Cascade Microtech Inc., Beaverton, OR, USA
fYear
2013
fDate
7-7 June 2013
Firstpage
1
Lastpage
4
Abstract
A new method is proposed for calibrating multi-channel probes placed in multiple quadrants for wafer or chip level measurement. It uses an additional ground-signal-ground probe to enable thru measurements in a conventional calibration procedure, avoiding the need for custom calibration kits. The inherent delay inconsistencies in the proposed method are shown to be small enough to have minimal effects on the measurement uncertainties, in most practical cases.
Keywords
calibration; delays; level measurement; measurement uncertainty; probes; chip level measurement; custom calibration kit; ground-signal-ground probe; inherent delay inconsistency; measurement uncertainty; multichannel probe; multiple quadrant; wafer level measurement; Calibration; Delays; Frequency measurement; Measurement uncertainty; Ports (Computers); Probes; Standards; N+1-port; SOLR; SOLT; calibration; calibration kit; calibration standard; multi-channel probe; thru;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Measurement Conference (ARFTG), 2013 81st ARFTG
Conference_Location
Seattle, WA
Print_ISBN
978-1-4673-4981-9
Type
conf
DOI
10.1109/ARFTG.2013.6579021
Filename
6579021
Link To Document