Title :
Monolithic photonic integrated circuit for optical performance monitoring of silicon Mach-Zehnder modulator in C and L bands
Author :
Kusaka, Hiroyuki ; Oka, Akira ; Goi, Kazuhiro ; Ogawa, Koichi ; Tsung-Yang Liow ; Xiaoguang Tu ; Guo-Qiang Lo ; Dim-Lee Kwong
Author_Institution :
Opt. & Electron. Lab., Fujikura Ltd., Chiba, Japan
fDate :
June 30 2013-July 4 2013
Abstract :
Monolithic photonic integrated circuit consisting of first-order mode splitter and Ge photodiode is designed, fabricated and characterized for optical performance monitoring of Si Mach-Zehnder modulator. First-order mode splitter is Si waveguide directional coupler with coupling length as short as 16 μm, allowing efficient transfer of first-order mode from main waveguide to sub waveguide. Evanescent-coupling Ge photodiode is fabricated on the sub waveguide. Optical performance monitoring is confirmed with responsivity higher than 50 mA/W in C and L bands.
Keywords :
elemental semiconductors; germanium; integrated optoelectronics; optical beam splitters; optical design techniques; optical directional couplers; optical fabrication; optical modulation; optical waveguides; photodiodes; silicon; C band; Ge; Ge photodiode; L band; Si; coupling length; evanescent-coupling; first-order mode splitter; monolithic photonic integrated circuit; optical performance monitoring; silicon Mach-Zehnder modulator; sub waveguide; waveguide directional coupler; Monitoring; Optical device fabrication; Optical fibers; Optical modulation; Silicon;
Conference_Titel :
OptoElectronics and Communications Conference held jointly with 2013 International Conference on Photonics in Switching (OECC/PS), 2013 18th
Conference_Location :
Kyoto
