Title :
Secondary-Ion-Mass Spectrometry and Refractive Index Profile Studies of Zn:Ni:LiNbO3 Optical Waveguides
Author :
Chiang, T.-Y. ; Liu, L.-Y. ; Tsai, W.S.
Author_Institution :
Dept. of Appl. Mater. & Optoelectron. Eng., Nat. Chi-Nan Univ., Nantou, Taiwan
fDate :
June 30 2013-July 4 2013
Abstract :
Optical waveguides of zinc and nickel co-diffused on lithium niobate substrates were measured with secondary-ion-mass spectrometry for metal ion concentrations and differential optical-fields for refractive index profiles. Correlation between compositional and optical properties was studied.
Keywords :
diffusion; integrated optics; lithium compounds; nickel; optical waveguides; refractive index; secondary ion mass spectra; zinc; LiNbO3; LiNbO3:Zn,Ni; codiffusion; compositional properties; differential optical-fields; lithium niobate substrates; metal ion concentrations; optical properties; optical waveguides; refractive index profile; secondary-ion-mass spectrometry; Optical device fabrication; Optical refraction; Optical variables control; Optical waveguides; Particle beam optics; Refractive index;
Conference_Titel :
OptoElectronics and Communications Conference held jointly with 2013 International Conference on Photonics in Switching (OECC/PS), 2013 18th
Conference_Location :
Kyoto
