Title :
Polymer-based waveguide optical sensor with tin oxide thin film for gas detection
Author :
Jung Woon Lim ; Seon Hoon Kim ; Jong-Sup Kim ; Jeong Ho Kim ; Yune Hyoun Kim ; Ju Young Lim ; Young-Eun Im ; Boo-Gyoun Kim ; Swook Hann
Author_Institution :
Korea Photonics Technol. Inst., Gwangju, South Korea
fDate :
June 30 2013-July 4 2013
Abstract :
We proposed optical sensor based on polymer waveguide with tin oxide thin film on the top of core layer exposed by removing upper cladding layer. This device was fabricated by the nano imprint lithography technique.
Keywords :
gas sensors; nanolithography; optical polymers; optical sensors; optical waveguides; soft lithography; tin compounds; SnO2; core layer; gas detection; nano imprint lithography technique; polymer-based waveguide optical sensor; tin oxide thin film; upper cladding layer; Optical device fabrication; Optical films; Optical polymers; Optical sensors; Optical surface waves; Optical waveguides;
Conference_Titel :
OptoElectronics and Communications Conference held jointly with 2013 International Conference on Photonics in Switching (OECC/PS), 2013 18th
Conference_Location :
Kyoto
