Title :
Pulsing electrical over-stress (EOS) testing and its failure analysis for advanced process integrated circuits
Author :
Yuan-Hung Tseng ; Chun-Liang Wang ; Yu-Chia Chang
Author_Institution :
Innovative Super. Technol. (Shanghai) Co. Ltd., Shanghai, China
Abstract :
In this paper, we develop a pulsing electrical over stress testing method to simulate different electrical over stress (EOS) in CMOS integrated circuits and the tolerance values distinguished from ESD failure. The electrical and deprocessing analysis shows that pulsing EOS testing can acquire a tolerance index of integrated circuits for production quality control.
Keywords :
CMOS integrated circuits; electrostatic discharge; failure analysis; integrated circuit testing; CMOS integrated circuit; ESD failure; advanced process integrated circuit; electrical over-stress; failure analysis; production quality control; pulsing EOS testing; tolerance index; CMOS integrated circuits; Earth Observing System; Electrostatic discharges; Inspection; Photonics; Testing;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2013 20th IEEE International Symposium on the
Conference_Location :
Suzhou
Print_ISBN :
978-1-4799-1241-4
DOI :
10.1109/IPFA.2013.6599234
