Title :
Anomalous degradation behavior of p-type polycrystalline silicon thin film transistors under negative gate bias stress
Author :
Meng Zhang ; Wei Zhou ; Rongsheng Chen ; Man Wong ; Hoi-Sing Kwok
Author_Institution :
Center for Display Res., Hong Kong Univ. of Sci. & Technol., Kowloon, China
Abstract :
Anomalous device degradation behavior of p-type polycrystalline silicon thin film transistors under negative gate bias stress is observed. In the first stage, negative gate bias instability dominates, resulting in negative threshold voltage (Vth) shift while in the second stage, negative charge generation induced by hot electrons happens, giving rise to positive Vth shift.
Keywords :
elemental semiconductors; negative bias temperature instability; silicon; thin film transistors; Si; anomalous device degradation; hot electrons happen; negative charge generation; negative gate bias instability; negative gate bias stress; negative threshold voltage shift; polycrystalline thin film transistors; Decision support systems; Failure analysis; Integrated circuits;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2013 20th IEEE International Symposium on the
Conference_Location :
Suzhou
Print_ISBN :
978-1-4799-1241-4
DOI :
10.1109/IPFA.2013.6599263