DocumentCode :
634109
Title :
A novel design of MEMS gyroscope with control capability
Author :
Yousefi, Zeinab ; Deyhim, Zahra ; Aghdam, Esmaeil Najafi ; Ghavifekr, Habib Badri
Author_Institution :
Fac. of Electr. Eng., Sahand Univ. of Technol., Tabriz, Iran
fYear :
2013
fDate :
14-16 May 2013
Firstpage :
1
Lastpage :
4
Abstract :
High performance MEMS gyroscopes can be implemented by embedding in a closed loop controller. For these gyroscopes, the electrostatic controlled force on the proof mass is inherently nonlinear. This study reports a MEMS gyroscope with control capability in which comb drive electrodes are employed as the controlling mechanism to linearize the electrostatic controlled force. To avoid interaction of drive and control comb drive electrodes, another mass has been added to the structure. Consequently, proposed gyroscope consists of a 2-DOF sense mode oscillator and a 1-DOF drive mode oscillator. The prototype with an overall size of 0.46 × 0.635 mm is designed to be fabricated in surface Micromachining process with 3 μm structural layer thickness. The device operation has verified by Finite Element Method simulations showing a raw mechanical sensitivity of 32 nm for drive direction oscillation amplitude of 120 nm and angular rotation of 50 [°/s].
Keywords :
closed loop systems; delta-sigma modulation; electrostatic devices; finite element analysis; gyroscopes; micromachining; micromechanical devices; oscillators; 1-DOF drive mode oscillator; 2-DOF sense mode oscillator; MEMS gyroscope; angular rotation; closed loop controller; control capability; controlling mechanism; device operation; drive and control comb drive electrodes; drive direction oscillation amplitude; electrostatic controlled force; finite element method simulations; mechanical sensitivity; proof mass; structural layer thickness; surface micromachining process; Electrodes; Force; Gyroscopes; Micromechanical devices; Oscillators; Sensors; Suspensions; 2-DOF oscillator; MEMS gyroscope; closed loop controller; delta sigma modulator;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrical Engineering (ICEE), 2013 21st Iranian Conference on
Conference_Location :
Mashhad
Type :
conf
DOI :
10.1109/IranianCEE.2013.6599662
Filename :
6599662
Link To Document :
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