Title :
Tracking control for piezo-actuated stage using sliding mode controller with observer-based hysteresis compensation
Author :
Muhammadi, Taufiq ; Wookyong Kwon ; Lee, Daewoo ; Sangchul Won
Author_Institution :
Grad. Inst. of Ferrous Technol., Pohang Univ. of Sci. & Technol., Pohang, South Korea
Abstract :
This paper presents a tracking control scheme for positioning of piezo-actuated stage under hysteresis effect. The hysteresis is estimated by an nonlinear observer and is compensated via feedforward control. Sliding mode controller is employed as a feedback control to track the reference. Experimental results showed effectiveness of the proposed scheme.
Keywords :
compensation; feedback; feedforward; observers; piezoelectric actuators; position control; variable structure systems; feedback control; feedforward control; hysteresis effect; nonlinear observer; observer-based hysteresis compensation; piezo-actuated stage positioning; sliding mode controller; tracking control scheme; Adaptive control; Electronic mail; Equations; Feedback control; Feedforward neural networks; Hysteresis; Observers; Hysteresis; Observer; Piezoelectric actuator; Tracking Control;
Conference_Titel :
Control Conference (ASCC), 2013 9th Asian
Conference_Location :
Istanbul
Print_ISBN :
978-1-4673-5767-8
DOI :
10.1109/ASCC.2013.6606011
