Title :
Micro defect detection in solar cell wafer based on hybrid illumination and near-infrared optics
Author_Institution :
Dept. of Aeronaut. & Mech. Eng., Korea Nat. Univ. of Transp., Chungju, South Korea
Abstract :
In this paper, an defect detection system based on hybrid illumination and near-infrared optics, is developed for solar cell wafer. It consists of geometrical camera optics, hybrid illumination device(HID), near-infrared(NIR) camera optics, machinery and control system and algorithm of defect detection and software. Especially, illumination conditions in HID is determined for reliable defect detection. Optimum illumination conditions in the HID are found with contrast analysis of RGB LED image, based on design of experiment. As a result, various surface micro defects are accurately detected. It is shown that the developed defect detection system can accurately detect micro defects of solar cell wafer.
Keywords :
cameras; design of experiments; flaw detection; geometrical optics; infrared detectors; inspection; solar cells; control system; design of experiment; geometrical camera optics; hybrid illumination device; machinery; microdefect detection; near-infrared camera optics; solar cell wafer; surface microdefects; Cameras; Inspection; Lenses; Light emitting diodes; Lighting; Photovoltaic cells; Defect detection system; Hybrid illumination device; Near-infrared optics; Optimum illumination condition; Solar cell wafer;
Conference_Titel :
Control Conference (ASCC), 2013 9th Asian
Conference_Location :
Istanbul
Print_ISBN :
978-1-4673-5767-8
DOI :
10.1109/ASCC.2013.6606013
