Electric Field and Interface Charge Extraction in Field-Plate Assisted RESURF Devices

Author

Boksteen, Boni K. ; Heringa, Anco ; Ferrara, A. ; Steeneken, Peter G. ; Schmitz, Jurriaan ; Hueting, Raymond J. E.

Author_Institution

MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands

Volume

62

Issue

2

fYear

2015

fDate

Feb. 2015

Firstpage

622

Lastpage

629

Abstract

A methodology for extracting the lateral electric field (Ex) in the drain extension of thin silicon-on-insulator high-voltage field-plate assisted reduced surface field (RESURF) devices is detailed including its limits and its accuracy. Analytical calculations and technology computer-aided design device modeling corresponding to experimental data are used. It is shown how to obtain trapped interface charge distributions (e.g., due to hot-carrier injection) from the extracted fields. Thus, a new method for determining the position and quantity of injected charges in the drain extension of RESURF power transistors is introduced.

Keywords

charge injection; electric fields; power transistors; semiconductor device models; silicon-on-insulator; technology CAD (electronics); RESURF power transistor; computer-aided design device modeling; field-plate assisted RESURF device; interface charge extraction; lateral electric field extraction; reduced surface field device; silicon-on-insulator; trapped interface charge distribution; Current measurement; Electric potential; Equations; Hot carrier injection; Human computer interaction; Logic gates; Mathematical model; Double-diffused metal-oxide-semiconductor; Double-diffused metal???oxide???semiconductor; electric field ( $boldsymbol {E}_{boldsymbol {x}}$ ); electric field (Eₓ); extraction; field-plate (FP); high voltage; hot-carrier injection (HCI); interface charge; power transistor; reduced surface field (RESURF); silicon-on-insulator (SOI); silicon-on-insulator (SOI).;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/TED.2014.2383360

Filename

7004006