Integrated slanted microneedle-LED array for optogenetics

This paper presents a three-dimensional (3-D) flexible micro light emitting diode (μ-LED) array for selective optical stimulation of cortical neurons. The array integrated individually addressable μ-LED chips with slanted polymer-based microneedle waveguides to allow precise light delivery to multiple cortical layers simultaneously. A droplet backside exposure method was developed to monolithically fabricate slanted microneedles on a single polymer platform. A wafer-level assembly technique was demonstrated, which permits large-scale, high-density system integration. The electrical, optical, thermal, and mechanical properties of the 3-D slanted microneedle-LED array were characterized experimentally.