Title :
A mixed-design technique for integrated MEMS using a circuit simulator with HDL
Author :
Toshiyoshi, Hiroshi ; Konishi, Tsuyoshi ; Machida, Kenji ; Masu, Kazuya
Author_Institution :
RCAST, Univ. of Tokyo, Tokyo, Japan
Abstract :
We report a multi-physics simulation and layout design technique for integrated-MEMS (microelectromechanical systems) based on an electrical circuit simulator. A solver for the mechanical equation of motion has been programmed in a Verilog-A compatible HDL (hardware description language) within the Cadence Virtuoso environment to attain new designing capabilities including automatic mask layout synthesis, DRC (design rule check), and LVS (layout-versus-schematic) verification for MEMS structures. Microelectromechanical components such as parallel-plate actuator and bending suspension are interpreted into HDL-coded equivalent circuits. Electrostatic displacement hysteresis is numerically simulated as a lumped mass-and-spring system and verified against the corresponding analytical simulation results. A multi-physics model for the Colpitts oscillator circuit has been built in the developed simulation environment, and its self-excited resonance has been confirmed by the simulation.
Keywords :
bending; circuit simulation; electric actuators; electrostatics; equivalent circuits; hardware description languages; integrated circuit layout; masks; micromechanical devices; mixed analogue-digital integrated circuits; numerical analysis; oscillators; suspensions (mechanical components); Cadence Virtuoso environment; Colpitts oscillator circuit; DRC; HDL-coded equivalent circuit; LVS; Verilog-A compatible HDL programming; automatic mask layout synthesis; bending suspension; design rule check; electrical circuit simulator; electrostatic displacement hysteresis; hardware description language; integrated MEMS structure; layout design technique; layout-versus-schematic verification; lumped mass-and-spring system; microelectromechanical system; mixed-design technique; motion mechanical equation; multiphysics simulation; numerical simulation; parallel-plate actuator; self-excited resonance; Actuators; Analytical models; Electrostatics; Force; Hardware design languages; Integrated circuit modeling; Micromechanical devices; equivalent circuit; hardware description language; integrated MEMS; multi-physics simulation;
Conference_Titel :
Mixed Design of Integrated Circuits and Systems (MIXDES), 2013 Proceedings of the 20th International Conference
Conference_Location :
Gdynia
Print_ISBN :
978-83-63578-00-8
