Title :
Application of a genetic algorithm for dimension optimization of the MEMS-based accelerometer
Author :
Melnyk, Mykhaylo ; Kernytskyy, A. ; Lobur, M. ; Szermer, Michal ; Zajac, Piotr ; Zabierowski, W.
Author_Institution :
CAD Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
Abstract :
A system for optimizing the size of MEMS-based accelerometer has been developed to meet the standards for the sensitivity and survivability, etc. A code has been written for the system ANSYS, allowing automatically conducting modal analysis or other research of MEMS design based on dimensions obtained from other system.
Keywords :
accelerometers; genetic algorithms; micromechanical devices; ANSYS system; MEMS design; MEMS-based accelerometer; automatically conducting modal analysis; dimension optimization; genetic algorithm; sensitivity standard; survivability standard; Accelerometers; Finite element analysis; Genetic algorithms; Micromechanical devices; Optimization; Robot sensing systems; Sensitivity; MEMS; accelerometer; computer-aided design; genetic algorithm;
Conference_Titel :
Mixed Design of Integrated Circuits and Systems (MIXDES), 2013 Proceedings of the 20th International Conference
Conference_Location :
Gdynia
Print_ISBN :
978-83-63578-00-8
