Title :
Progress of thin film transistor technology - Large-area mass production and beyond
Author_Institution :
Thin Film Nano & Microelectron. Res. Lab., Texas A&M Univ., College Station, MS, USA
Abstract :
The thin film transistor liquid crystal is one of the most successful electronic products in the last two decades. It affects almost everyone´s daily life throughout the world. The first report of the amorphous silicon thin film transistor triggered the revolution of the field. In the past 30 years, the thin film transistor technology has progressed dramatically, especially in the large-area, low-temperature, high-throughput fabrication process. Recently, new types of TFTs with the improved mobility, flexible material properties, or novel structures have been reported for applications in displays, sensors, imagers, etc. The uniqueness of the thin film transistor technology lies in the versatile structure and composing materials with few limits on the substrate material and size. Although applications of thin film transistors are broader than those of ICs, these two technologies can complement each other.
Keywords :
elemental semiconductors; image sensors; liquid crystal displays; silicon; thin film sensors; thin film transistors; IC; Si; electronic product; flexible material property; image sensor; thin film transistor liquid crystal display; time 30 year; Arrays; Fabrication; Logic gates; Production; Substrates; Thin film transistors;
Conference_Titel :
Active-Matrix Flatpanel Displays and Devices (AM-FPD), 2013 Twentieth International Workshop on
Conference_Location :
Kyoto