Title :
Past, current and future TFT technologies for display manufacturing
Author_Institution :
Dept. of Inf. Display, Kyung Hee Univ., Seoul, South Korea
Abstract :
TFT active-matrix is a key technology for display manufacturing such as AMLCD and AMOLED display. Past, current and future TFT technologies are reviewed and discussed with the use of amorphous silicon (a-Si), low-temperature poly-Si (LTPS), organic and oxide semiconductors. TFT technologies based on a-Si:H and LTPS are mature enough, but the TFTs with oxide and organic semiconductors are still many issues to be solved for large scale manufacturing. Currently, display manufacturing based on a-IGZO TFT backplane is hot issue because a-Si:H production line can be easily modified to that for IGZO TFTs.
Keywords :
LED displays; amorphous semiconductors; elemental semiconductors; liquid crystal displays; organic semiconductors; silicon; thin film transistors; AMLCD display; AMOLED display; InGaZnO; Si:H; TFT active-matrix; TFT technologies; amorphous silicon; display manufacturing; large scale manufacturing; low-temperature poly-Si; organic semiconductors; oxide semiconductors; Active matrix organic light emitting diodes; Backplanes; Crystallization; Logic gates; Manufacturing; TV; Thin film transistors;
Conference_Titel :
Active-Matrix Flatpanel Displays and Devices (AM-FPD), 2013 Twentieth International Workshop on
Conference_Location :
Kyoto
