DocumentCode
641301
Title
[Front cover]
fYear
2013
fDate
28-29 March 2013
Abstract
The following topics are dealt with: MEMS technology; electrostatic microactuators; MEMS in radar; bionanosensors; microtechnology research; nanotechnology research; energy management vision; system integration; material science; microoptics; nanooptics; and computational intelligence.
Keywords
biosensors; electrostatic actuators; energy management systems; micro-optics; nanophotonics; nanosensors; MEMS in radar; MEMS technology; bionanosensors; computational intelligence; electrostatic microactuators; energy management vision; material science; microoptics; microtechnology research; nanooptics; nanotechnology research; system integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Smart Structures and Systems (ICSSS), 2013 IEEE International Conference on
Conference_Location
Chennai
Print_ISBN
978-1-4673-6240-5
Type
conf
DOI
10.1109/ICSSS.2013.6622988
Filename
6622988
Link To Document