An integrated filtering antanna of terahertz antenna-in-package

An integrated THz filtering antenna of AIP (antenna in package) is proposed. As the indispensable parts of THz AIP, antenna and filter are designed together and fabricated by MEMS (Micro-electromechanical System) technology on silicon substrate. A MEMS H-plane horn antenna from 400GHz to 500GHz is designed as AIP antenna element, and a well designed E-plane metallic-via filter is chosen as filter element. The good performance of this filtering antenna is shown by the simulated results. A photomask of filtering antenna with other AIP devices is made to prove the feasibility of this design.