Abstract :
The following topics are dealt with: acoustic sensors; actuators; gyroscopes; infrared sensor; magnetic sensor; pressure sensor; flow sensor; tactile sensors; thermometers; nanosensor; packaging; etching; bio-chemical sensors; microsensor; gas sensor; humidity sensor and microfluidics.
Keywords :
acoustic transducers; actuators; biosensors; etching; flow sensors; gas sensors; gyroscopes; humidity sensors; infrared detectors; magnetic sensors; microfluidics; microsensors; nanosensors; packaging; pressure sensors; tactile sensors; thermometers; acoustic sensor; actuator; biochemical sensor; etching; flow sensor; gas sensor; gyroscope; humidity sensor; infrared sensor; magnetic sensor; microfluidics; microsensor; nanosensor; packaging; pressure sensor; tactile sensor; thermometer;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626682
