DocumentCode
642072
Title
Estimation of validity of optical measurements
Author
Guzhov, V.I. ; Ilinykh, S.P. ; Khaidukov, D.S. ; Kuznetsov, R.A.
Author_Institution
Novosibirsk State Tech. Univ., Novosibirsk, Russia
fYear
2012
fDate
2-4 Oct. 2012
Firstpage
146
Lastpage
149
Abstract
New principle for comparing characteristics and for calibrating optical interference measurement systems with different laser wave lengths is proposed. Results of measurements obtained with both the reference and the tested measuring systems are represented in the form of solution of comparison system that is mapped on the complex phase plane. The proposed approach allows obtaining estimates for random and systematic errors with high accuracy without using specific references.
Keywords
calibration; light interference; measurement by laser beam; measurement errors; optical variables measurement; calibration; complex phase plane; laser wavelengths; measuring systems; optical interference measurement systems; random error; systematic error; Adaptive optics; Educational institutions; Estimation; Optical interferometry; Optical variables measurement; Phase shifting interferometry; Publishing;
fLanguage
English
Publisher
ieee
Conference_Titel
Actual Problems of Electronics Instrument Engineering (APEIE), 2012 11th International Conference on
Conference_Location
Novosibirsk
Print_ISBN
978-1-4673-2842-5
Type
conf
DOI
10.1109/APEIE.2012.6628978
Filename
6628978
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