DocumentCode :
642072
Title :
Estimation of validity of optical measurements
Author :
Guzhov, V.I. ; Ilinykh, S.P. ; Khaidukov, D.S. ; Kuznetsov, R.A.
Author_Institution :
Novosibirsk State Tech. Univ., Novosibirsk, Russia
fYear :
2012
fDate :
2-4 Oct. 2012
Firstpage :
146
Lastpage :
149
Abstract :
New principle for comparing characteristics and for calibrating optical interference measurement systems with different laser wave lengths is proposed. Results of measurements obtained with both the reference and the tested measuring systems are represented in the form of solution of comparison system that is mapped on the complex phase plane. The proposed approach allows obtaining estimates for random and systematic errors with high accuracy without using specific references.
Keywords :
calibration; light interference; measurement by laser beam; measurement errors; optical variables measurement; calibration; complex phase plane; laser wavelengths; measuring systems; optical interference measurement systems; random error; systematic error; Adaptive optics; Educational institutions; Estimation; Optical interferometry; Optical variables measurement; Phase shifting interferometry; Publishing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Actual Problems of Electronics Instrument Engineering (APEIE), 2012 11th International Conference on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4673-2842-5
Type :
conf
DOI :
10.1109/APEIE.2012.6628978
Filename :
6628978
Link To Document :
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