Title :
Modelling of a charge control method for capacitive MEMS
Author :
Giounanlis, Panagiotis ; Blokhina, Elena ; Feely, Orla ; Dominguez, Manuel ; Pons Nin, Joan ; Gorreta, Sergi
Author_Institution :
Electron. & Commun. Eng., Univ. Coll. Dublin, Dublin, Ireland
Abstract :
Charging of dielectric materials in microelectrome-chanical systems (MEMS) actuated electrostatically is a major reliability issue. In our previous work we proposed a feedback loop control method that is implemented as a circuit and that allows smart actuation for switches and varactors. In this paper we discuss system-level modeling of MEMS devices including all aspects of the system: proposed control method, charging dynamics and realistic models of the mechanical components of MEMS.
Keywords :
dielectric materials; electrostatic actuators; feedback; intelligent actuators; microswitches; reliability; varactors; capacitive MEMS; charge control method; dielectric material; electrostatic actuator; feedback loop control method; mechanical component; microelectromechanical system; reliability; smart actuation; switch; varactor; Capacitance; Electrodes; Integrated circuit modeling; Mathematical model; Micromechanical devices; Varactors;
Conference_Titel :
Circuit Theory and Design (ECCTD), 2013 European Conference on
Conference_Location :
Dresden
DOI :
10.1109/ECCTD.2013.6662324
