PECVD Intermediate and Absorber Layers Applied in Liquid-Phase Crystallized Silicon Solar Cells on Glass Substrates

Author

Gabriel, Onno ; Frijnts, Tim ; Calnan, Sonya ; Ring, Sven ; Kirner, Simon ; Opitz, Andreas ; Rothert, Inga ; Rhein, Holger ; Zelt, Matthias ; Bhatti, Khalid ; Zollondz, Jens-Hendrik ; Heidelberg, Andreas ; Haschke, Jan ; Amkreutz, Daniel ; Gall, S. ; Frie

Author_Institution

PVcomB, Helmholtz-Zentrum Berlin fur Mater. und Energie GmbH, Berlin, Germany

Volume

4

Issue

6

fYear

2014

fDate

Nov. 2014

Firstpage

1343

Lastpage

1348

Abstract

Liquid-phase crystallized silicon absorber layers have been applied in heterojunction solar cells on glass substrates with 10.8% conversion efficiency and an open-circuit voltage of 600 mV. Intermediate layers of SiO_x, SiN_x, and SiO_xN_y, as well as the a-Si:H precursor layer, were deposited on 30 cm × 30 cm glass substrates using industrial-type plasma-enhanced chemical vapor deposition equipment. After crystallization on 3cm × 5cm area using a continuous-wave infrared laser line, the resulting polysilicon material showed high material quality with large grain sizes.

Keywords

crystallisation; elemental semiconductors; grain size; plasma CVD; semiconductor heterojunctions; silicon; silicon compounds; solar absorber-convertors; solar cells; PECVD absorber layer; PECVD intermediate layer; Si; Si:H; SiO₂; SiO_x-SiO_xN_y; continuous-wave infrared laser line; crystallization; glass substrate; grain size; heterojunction solar cell; industrial-type plasma-enhanced chemical vapor deposition; liquid-phase crystallized silicon solar cell; open-circuit voltage; polysilicon material; Chemical vapor deposition; Crystallization; Glass; Photovoltaic cells; Silicon; Substrates; Heterojunction; liquid-phase crystallization; plasma-enhanced chemical vapor deposition (PECVD); thin-film silicon;

fLanguage

English

Journal_Title

Photovoltaics, IEEE Journal of

Publisher

ieee

ISSN

2156-3381

Type

jour

DOI

10.1109/JPHOTOV.2014.2354257

Filename

6895250