Title :
Design and microfabrication of frequency selective uncooled microbolometer focal plane array for terahertz imaging
Author :
Oulachgar, H. ; Mauskopf, Phillip ; Bolduc, M. ; Ilias, S. ; Paultre, J.-E. ; D´Amato, D. ; Terroux, Marc ; Pope, T. ; Alain, C. ; Topart, P. ; Jerominek, H.
Author_Institution :
Inst. Nat. d´Opt. (INO), Quebec City, QC, Canada
Abstract :
A THz frequency selective microbolometer focal plane array (FPA) with 35 μm pixel pitch and a resolution of 384×288 pixels was recently developed at INO. The FPA was fabricated on a CMOS readout circuit using MEMS surface micromachining techniques. The uncooled microbolometer detectors, based on vanadium oxide technology, were optimized for detection at 4.25 THz. A high performance frequency selective THz camera operating at 4.25 THz was also demonstrated.
Keywords :
CMOS integrated circuits; bolometers; focal planes; micromachining; readout electronics; terahertz wave imaging; vanadium compounds; CMOS readout circuit; MEMS surface micromachining techniques; THz camera; VO; design; focal plane array; frequency 4.25 THz; frequency selective uncooled microbolometer; microfabrication; terahertz imaging; uncooled microbolometer detectors; vanadium oxide technology; Absorption; Arrays; Cameras; Detectors; Measurement by laser beam; Noise; Resonant frequency;
Conference_Titel :
Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2013 38th International Conference on
Conference_Location :
Mainz
DOI :
10.1109/IRMMW-THz.2013.6665501
