Design and microfabrication of frequency selective uncooled microbolometer focal plane array for terahertz imaging

Author

Oulachgar, H. ; Mauskopf, Phillip ; Bolduc, M. ; Ilias, S. ; Paultre, J.-E. ; D´Amato, D. ; Terroux, Marc ; Pope, T. ; Alain, C. ; Topart, P. ; Jerominek, H.

Author_Institution

Inst. Nat. d´Opt. (INO), Quebec City, QC, Canada

fYear

2013

fDate

1-6 Sept. 2013

Firstpage

1

Lastpage

2

Abstract

A THz frequency selective microbolometer focal plane array (FPA) with 35 μm pixel pitch and a resolution of 384×288 pixels was recently developed at INO. The FPA was fabricated on a CMOS readout circuit using MEMS surface micromachining techniques. The uncooled microbolometer detectors, based on vanadium oxide technology, were optimized for detection at 4.25 THz. A high performance frequency selective THz camera operating at 4.25 THz was also demonstrated.

Keywords

CMOS integrated circuits; bolometers; focal planes; micromachining; readout electronics; terahertz wave imaging; vanadium compounds; CMOS readout circuit; MEMS surface micromachining techniques; THz camera; VO; design; focal plane array; frequency 4.25 THz; frequency selective uncooled microbolometer; microfabrication; terahertz imaging; uncooled microbolometer detectors; vanadium oxide technology; Absorption; Arrays; Cameras; Detectors; Measurement by laser beam; Noise; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2013 38th International Conference on

Conference_Location

Mainz

Type

conf

DOI

10.1109/IRMMW-THz.2013.6665501

Filename

6665501