Title :
A micro-cantilever based photoacoustic detector of Terahertz radiation for chemical sensing
Author :
Glauvitz, Nathan E. ; Coutu, Ronald A. ; Petkie, Douglas T. ; Medvedev, Ivan R.
Author_Institution :
Dept. of Electr. & Comput. Eng., Air Force Inst. of Technol., Wright-Patterson AFB, OH, USA
Abstract :
A Microelectromechanical system (MEMS) cantilever pressure sensor was designed, modeled, fabricated, and tested for sensing the photoacoustic response of gases to Terahertz (THz) radiation. This paper describes manufacturing, experimental set-up and the most recent spectroscopic results, which demonstrate the capabilities of this spectroscopic technique.
Keywords :
cantilevers; gas sensors; microfabrication; microsensors; photoacoustic spectra; pressure sensors; terahertz wave detectors; terahertz wave spectra; MEMS cantilever pressure sensor; THz radiation; chemical sensing; gas sensor; microcantilever; microelectromechanical system; photoacoustic detector; spectroscopic technique; terahertz radiation; Handheld computers; Harmonic analysis; Heating; Lenses; Metals; Optical modulation; Optical variables measurement;
Conference_Titel :
Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2013 38th International Conference on
Conference_Location :
Mainz
DOI :
10.1109/IRMMW-THz.2013.6665540
