Inline multilayer thickness sensing by using terahertz time-domain spectroscopy in reflection geometry

Author

Krimi, Soufiene ; Klier, J. ; Herrmann, Markus ; Jonuscheit, Joachim ; Beigang, Rene

Author_Institution

Fraunhofer IPM, Kaiserslautern, Germany

fYear

2013

fDate

1-6 Sept. 2013

Firstpage

1

Lastpage

2

Abstract

We present a novel approach to determine the individual layer thickness in a dielectric multilayer sample using pulsed terahertz spectroscopy in reflection geometry. In a first step, the optical parameters of each layer have to be determined. Based on these parameters, we simulate the reflected THz-pulse from the multilayer system and compare it to the measurement. A genetic algorithm is used to determine the best agreement between simulation and measurement by varying the thickness of each layer.

Keywords

genetic algorithms; multilayers; terahertz wave spectra; thickness measurement; time-domain analysis; dielectric multilayer; genetic algorithm; inline multilayer thickness sensing; layer optical parameters; multilayer system; pulsed terahertz spectroscopy; reflected terahertz-pulse; reflection geometry; terahertz time-domain spectroscopy; Mathematical model; Nonhomogeneous media; Reflection; Spectroscopy; Substrates; Time-domain analysis;

fLanguage

English

Publisher

ieee

Conference_Titel

Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2013 38th International Conference on

Conference_Location

Mainz

Type

conf

DOI

10.1109/IRMMW-THz.2013.6665871

Filename

6665871